In-situ Self Calibration of Nano-metrological Sensors and its Uncertainty

摘要

In some cases of profile measurements, the influence of the linearity error becomes more important than that of the sensitivity error. It becomes especially important to calibrate and compensate the linearity errors of sensors which are used in nanometrology. In the choice of a calibration method, the uncertainty of the compensation using the calibration result should be taken care of as well as the accuracy and resolution of the calibration itself.