A Simple Modeling Method For On-chip Spiral Inductors After Ion Irradiation

摘要

This paper shows a simple method via multiplying the equivalentsubstrate resistance by a factor, to build models for on-chipspiral inductors after ion irradiation, which has been used toimprove the Q of inductors. This will save the time for buildingmodeling for circuit simulation. The factor is dependent on theinner diameter and turns of the inductor and the relationship isneeded to investigate further.AcknowledgementsThis work was partially supported by STARC, MIC, SCOPE, MEXT,NEDO, Canon Foundation and VDEC in collaboration with CadenceDesign Systems, Inc., and Agilent Technologies Japan, Ltd.