首页> 外文会议>Indium Phosphide amp; Related Materials, 2009. IPRM '09 >Surface states passivation for and regrowth around nanoposts formed for the fabrication of InP-based intersubband quantum box lasers
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Surface states passivation for and regrowth around nanoposts formed for the fabrication of InP-based intersubband quantum box lasers

机译:用于制备基于InP的子带间量子盒激光器的纳米柱的表面态钝化和再生长

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Passivation of interfaces corresponding to the nanoposts' sidewalls in InP-based intersubband quantum-box (IQB) lasers has resulted in interfacial-state densities < 1011/cm2. High-quality regrowths of semi-insulating InP around dry-etched, passivated, 40 nm-diameter nanoposts were realized.
机译:在基于InP的子带间量子盒(IQB)激光器中,对应于纳米柱侧壁的界面钝化,导致界面态密度<10 11 / cm 2 。实现了干法刻蚀,钝化的40 nm直径纳米柱周围的半绝缘InP的高质量再生长。

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