Room-Temperature Quantum Sensing in CMOS: On-Chip Detection of Electronic Spin States in Diamond Color Centers for Magnetometry

摘要

In this paper, we report the first on-chip quantum sensor that combines compact and multifunctional CMOS integrated circuit technologies with nitrogen-vacancy (NV) centers in diamond. The system performs two critical functions for quantum magnetometry with NV centers: strong generation and efficient delivery of microwave for quantum-state control, and optical filtering/detection of spin-dependent fluorescence for quantum-state readout. In particular, we experimentally demonstrate on-chip optically detectable magnetic resonance (ODMR) for the first time.