Design and Simulation of MEMS AlN Piezoelectric Vibration Energy Harvester Array for Improved Power Density

摘要

This paper presents a micro electro mechanical system (MEMS) based piezoelectric vibration energy harvester. The effect of beam geometry and shape of the proof mass on the resonant frequency is analysed. Here an energy harvester using Aluminum Nitride (AlN) is designed. A complete design flow of the piezoelectric vibration energy harvester for increased output power is proposed. The proposed structure was able to generate an output power of 1.388 mW at a resonant frequency of 576.8 Hz when excited by an input acceleration of 0.5 g. The areal power density of the harvester is 36.06 μW mm