Nickel Oxide Thin Films by Radio Frequency Sputter for Inverted Perovskite Solar Cells

摘要

The Fabrication of efficient hole transport layer (HTL) is one of essential components for high efficiency of inverted perovskite solar cells because the HTL plays an important role for hole transport, electron blocking, and light penetration for light energy conversion. In contrary to conventional solution process, we here fabricate the nickel oxide thin films by radio frequency sputter as HTL and investigate their optical and electrical properties. The conversion efficiency is reached to 12.39% with the control of deposition parameters.