PPF Control of a Piezoelectric Tube Scanner

摘要

Piezoelectric tubes are commonly used in Scanning Tunnelling Microscopes and Atomic Force Microscopes to scan material surfaces. In general, scanning using a piezoelectric tube is hampered by the presence of low-frequency mechanical modes that are easily excited to produce unwanted vibration. In this work, a Positive Position Feedback controller is designed to mitigate the undesired mechanical resonance. Experimental results reveal a significant damping of the mechanical dynamics, and consequently, an improvement in tracking performance.