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Perturbation Approach for Analyzing Microstructures

机译:微结构分析的摄动方法

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摘要

Perturbations arising from sharp discontinuities of surface relief profiles can have significant effects on the field transmitted through diffractive structures. A method utilizing these perturbations is presented for efficient analysis of the response of surface profiles in the non-paraxial domain. Comparison with rigorous diffraction theory proves the method reliable and the numerical feasibility of the approach is much better than that of rigorous methods.
机译:表面起伏轮廓的急剧不连续所引起的扰动会对通过衍射结构传输的场产生重大影响。提出了一种利用这些扰动的方法来有效分析非傍轴区域中表面轮廓的响应。与严格衍射理论的比较证明了该方法的可靠性,该方法的数值可行性比严格方法要好得多。

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