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In Situ Characterization of Crystal Growth and Heat Treatment In Semiconductor Materials

机译:半导体材料中晶体生长和热处理的原位表征

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摘要

In situ characterization methods are being developed at the Idaho National Laboratory that can be used to characterize the atomic lattice structure of materials used for semiconductor and scintillation detectors during the crystal growth and heat treatment processes, which have been shown to be critical for the development of optimized semiconductor and scintillation radiation detectors. Multiple methods for implanting positrons into the material have been developed and integrated with measurement techniques including Doppler broadening, coincidence Doppler broadening and positron lifetime measurement. The INL developed induced positron technique allows positron measurements to be performed at depth up to 10 cm inside crystal boules. Also, a portable measurement system suitable for field use has been developed that is suitable for assessing heat treatments at depths up to 1 cm inside a material in an industrial environment. Results of measurements that address the effects of composition and heatup/melting/cool down on material lattice structures are discussed along with plans for the in situ crystal studies.
机译:爱达荷州国家实验室正在开发原位表征方法,该方法可用于表征晶体生长和热处理过程中用于半导体和闪烁检测器的材料的原子晶格结构,这已被证明对开发晶体至关重要。优化的半导体和闪烁辐射探测器。已经开发出多种将正电子注入材料的方法,并与包括多普勒展宽,巧合多普勒展宽和正电子寿命测量在内的测量技术集成在一起。 INL开发的感应正电子技术允许在晶体棒内部10 cm的深度进行正电子测量。另外,已经开发出适用于现场使用的便携式测量系统,其适合于在工业环境中评估材料内部最深1 cm处的热处理。讨论了解决成分和加热/熔化/冷却对材料晶格结构影响的测量结果以及原位晶体研究计划。

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