首页> 外文会议>Fifteenth International Symposium on Chemical Vapor Deposition, May 14-18, 2000, Toronto, Ontario >EVALUATION OF VARIOUS HYPOTHESES ON THE INFLUENCE OF NITROGEN ON DIAMOND GROWTH IN AN OXY-ACETYLENE TORCH REACTOR
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EVALUATION OF VARIOUS HYPOTHESES ON THE INFLUENCE OF NITROGEN ON DIAMOND GROWTH IN AN OXY-ACETYLENE TORCH REACTOR

机译:氮假设对氧-乙炔炬反应器中金刚石生长的影响

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摘要

Addition of di-nitrogen to the feed gas has been shown to greatly influence growth rates and morphology of the deposited layer in various diamond CVD techniques. In this paper, several hypotheses for these phenomena, as presented in literature, are tested for the case of oxy-acetylene diamond CVD. For this purpose, simulation models for hydrodynamics and combustion chemistry are extended with detailed models for nitrogen chemistry. Based on the simulation results, several proposed hypotheses can be ruled out as possible explanations for the observed phenomena.
机译:在各种金刚石CVD技术中,向原料气中添加二氮已显示出极大地影响生长速率和沉积层的形貌。在本文中,针对氧-乙炔金刚石CVD的情况测试了文献中提出的针对这些现象的几种假设。为此,用详细的氮化学模型扩展了流体力学和燃烧化学的模拟模型。根据模拟结果,可以排除一些提出的假设,作为对观察到的现象的可能解释。

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