Cubic Zn_xMg_(1-x)O and Ni_yMg_(1-y)O thin films grown by molecular beam epitaxy for deep-UV optoelectronic applications

摘要

We will discuss the epitaxial growth, characterization, and application of a new set of ternary cubic oxide semiconductor compounds, Zn_xMg_(1-x)O and Ni_yMg_(1-y)O, offering a new route towards deep-UV optical devices. Results demonstrating bandgap tunability and excellent thin film quality will be presented validating the potential of these alloys in the 200 - 350 nm region. Significantly, we have successfully fabricated MSM solar blind detectors using both ternary alloys, demonstrating operation in the solar blind region without external opal filters.