High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes

摘要

The present study aims to achieve high volume manufacturing of nanofabrication techniques for optical MEMS devices and expand the resolution limits of ecofriendly developable processes in advanced lithography using the new family of positive-tone nano-patterning materials derived from biomass. The volume manufacturing of nanofabrication techniques and resolution limits of the ecofriendly developable processes using the 50 nm positive-tone nano-patterning materials was dramatically improved by changing and approached the existing resolution limits of non-ecofriendly development processes involving highly toxic organic solvents and tetramethylammonium hydroxide. The newly biomass material and the ecofriendly processes are expected as one of the nanofabrication techniques in next generation optical MEMS devices.