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Dry Adhesives for MEMS Assembly, Manipulation and Integration: Progress and Challenges

机译:用于MEMS组装,操作和集成的干胶:进展与挑战

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摘要

Bioinspired synthetic dry adhesives offer unique potential in the field of micro assembly and manipulation. These adhesives, which take their basic operating principle from animals like geckos, use van der Waals adhesion forces and mechanical fiber optimization to produce significant forces. For several years, these materials have been of interest for climbing robots and adhesive surfaces due to potential characteristics like self-cleaning or anti-fouling behavior, anisotropic adhesion strengths and non-transferring materials. These same strengths would make these materials an ideal mechanism for handling delicate parts or manipulating structures in the field of micro-electro-mechanical systems (MEMS) packaging. In this paper, I review the specific fabrication processes developed by our group and examine some of the challenges in their integration with MEMS assembly and packaging processes. Improving normal adhesion strength and directionality of adhesives has been completed and work is beginning to focus on reducing polymer transfer and improving the anti-static compatibility of the structural materials used in the adhesives.
机译:受生物启发的合成干胶在微组装和操作领域具有独特的潜力。这些胶粘剂采用壁虎等动物的基本工作原理,利用范德华力和机械纤维优化产生显着的力。多年来,由于潜在的特性(如自清洁或防污行为,各向异性的粘合强度和非转移性材料),这些材料已成为攀爬机器人和粘合表面的关注对象。这些相同的优势将使这些材料成为微机电系统(MEMS)包装领域中处理精密零件或操纵结构的理想机制。在本文中,我回顾了我们小组开发的特定制造工艺,并探讨了它们与MEMS组装和封装工艺集成的挑战。提高粘合剂的正常粘合强度和方向性的工作已经完成,并且工作开始集中在减少聚合物转移和提高粘合剂中使用的结构材料的抗静电相容性上。

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