Abstract: Diffractive microlens arrays have been designed to improve the performance of PtSi Schottky barrier IR image sensors. They have been fabricated on the surface of Si substrates by successive photolithography and Ar$+$PLU$/ ion-beam-etching technique, which operate at $lambda $EQ 4.0 $mu@m with a lens diameter of 100 $mu@m and the lens F number of 1.56. The practical processes and fabrication method are shown and discussed. The microanalysis and optical characteristics of the diffractive microlens arrays are also presented. The experimental and theoretical results are in good agreement. !5
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机译：摘要：已经设计了衍射微透镜阵列来提高PtSi肖特基势垒红外图像传感器的性能。它们是通过连续光刻和Ar $ + $ PLU $ /离子束刻蚀技术在Si衬底表面上制造的，其工作在λ$ EQ 4.0 $ mu @ m，透镜直径为100 $ mu @ m镜头F值为1.56。显示并讨论了实际的工艺和制造方法。还介绍了衍射微透镜阵列的微分析和光学特性。实验和理论结果吻合良好。 ！5
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