Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation

摘要

In this paper we present a method that optimizes the OPC model generation process. The elements in this optimized flow include: an automated test structure layout engine; automated SEM recipe creation and data collection; and OPC model anchoring/validation software. The flow is streamlined by standardizing and automating these steps and their inputs and outputs. A major benefit of this methodology is the ability to perform multiple OPC "screening" refinement loops in a short time before embarking on final model generation. Each step of the flow is discussed in detail, as well as our multi-pass experimental design for converging on a final OPC data set. Implementation of this streamlined process flow drastically reduces the time to complete OPC modeling, and allows generation of multiple complex OPC models in a short time, resulting in faster release and transfer of a next-generation product to manufacturing.