首页> 外文会议>Defect recognition and image processing in semiconductors 1995 >Fine structure observed in the thermal emission process for defects in semiconductors
【24h】

Fine structure observed in the thermal emission process for defects in semiconductors

机译:在热发射过程中观察到的精细结构可发现半导体中的缺陷

获取原文
获取原文并翻译 | 示例

摘要

High-resolution Laplace-transform DLTS technique has been used to study the influence of small disturbances on the carrier emission process for transition metal- and thermal donors-related defects in silicon. For the iron-boron pair in the p-type silicon, two different configurations of the defect have been observed: stable and metastable. For both of them the influence of the magnetic field on the hole emission is demonstrated and a possible microscopic structure of the metastable defect configuration is discussed. Due to the resolution of the method it was also possible to demonstrate a complex character of the electron emission for two charge states of thermal donors in the n-type silicon and observe the influence of the magnetic field on the process.
机译:高分辨率拉普拉斯变换DLTS技术已用于研究小干扰对硅中与过渡金属和热供体相关的缺陷的载流子发射过程的影响。对于p型硅中的铁硼对,已观察到两种不同的缺陷构型:稳定和亚稳。对于这两种方法,都证明了磁场对空穴发射的影响,并讨论了亚稳缺陷结构的可能微观结构。由于该方法的分辨率,还可能证明n型硅中热施主的两个电荷状态的电子发射具有复杂的特征,并观察磁场对工艺的影响。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号