Silicon photodiodes and PIN diodes developed at the Institute of Electron Technology

摘要

The paper presents the results of the work on high speed epiplanar photodiodes of a small active area used in laser and fiber-optic techniques and epiplanar diodes of a large active area destined for nuclear radiation detection. Also planar diodes with a large active area and thick active region assigned for detection of optical, nuclear and X radiation are discussed.