Pulsed laser deposition of phosphor nitride thin films

摘要

In this paper we report on the results of experimental investigationsof processes of pulse laser reactive deposition and structure formation and characteristics of AlN, AlN:Mn, GaN, GaN:Zn, GaN:Mn, GaN:Cr, MgSiN_2:Ti, SrSiN_2:Eu thin films which have been condensed from laser erosion lasma into reactive atmophere (nitrogen).