RAS (RADICAL ASSISTED SPUTTERING) SYSTEM AND ITS APPLICATION ON DEPOSITING OPTICAL THIN FILMS

机译：RAS（自由基辅助溅射）系统及其在沉积光学薄膜中的应用

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The RAS (Radical Assisted Sputtering) system was developed to deposit stoichiometric dielectric films with dense microstructures under relative high deposition. Edge filters stacked by such dense films were wavelength shiftless and showed good repeatability and uniformity.

机译：开发了RAS（径向辅助溅射）系统，以在相对较高的沉积条件下沉积具有致密微观结构的化学计量介电膜。由这种致密膜堆叠的边缘滤光片是无波长偏移的，并且显示出良好的可重复性和均匀性。

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《Conference on Optical Interference Coatings: Postconference Digest, Jul 16-20, 2001》|2001年|p.MB5.1-5.3|共3页
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作者
Ekishu Nagae; Takeshi Sakurai; Shigeharu Matsumoto;
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Research and Development Department, SHINCRON CO., Ltd., 2-6 Minami-ohi 3 Chome, Shinagawa-ku, Tokyo, 140-8540 Japan;

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原文格式 PDF
正文语种 eng
中图分类化学工业;
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入库时间 2022-08-26 14:12:21

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机译：溅射铝掺杂氧化锌薄膜上的有损模式共振发电，用于在多模光纤结构上进行传感在1.55μm波长范围内的应用

RAS (RADICAL ASSISTED SPUTTERING) SYSTEM AND ITS APPLICATION ON DEPOSITING OPTICAL THIN FILMS

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