Model Development and Control Design for High Speed Atomic Force Microscopy

摘要

This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.