Dynamic control method of the scan speed in atomic force microscopy and a system thereof

摘要

the subject of the invention is a dynamic control speed scanning in microscopy and a dynamic control to the sil nuclear scanning in microscopy atomic znajdujacej zastos silmonitoring with high resolution studies of microelectronic structures, materialu00f3w, organic samples, etc.how has this, with stanowiacy difference between signal wartoscia inflicted and wartoscia signal recorded surface heading to block subtraction (because)in which of the mistake border surface mapping raised in block of parameter mistake border surface mapping (bp) subtracted value difference tell's ruthlessy wartoscia inflicted and wartoscia signal recorded, received signal controls the generator's signalling sterujacych scanning process (ge)which still generates signals controlling horizontal being samplewhen the difference between wartoscia inflicted and wartoscia signal exceeds the value registered mistake border surface mapping.i get work generator signalling sterujacych scanning process (ge) and horizontal control signals being sampled.however, where the difference between wartoscia inflicted and wartoscia signal recorded is smaller than the value mapping mistake border areahe runs the generator sterujacych signalling process scanning (ge).the arrangement has a block subtraction (because) connected with the generator simultaneously signalling sterujacych scanning process (ge), the regulator of proportionality - calkujaco - ru00f3zniczkujacym (pid)the data acquisition block (ba) and block any parameter mistake border surface mapping (bp).