Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining

摘要

We have extended the technology of fabrication of optical spherical mirrors by using single-mask bulk micromachining to fabricate highly-uniform spherical arrays of micro-mirrors and to mold polymer-on-glass microlenses. The arrays fabricated feature 100% optical fill factor and very high field uniformity of optical characteristics of individual micro-mirrors (lenses). The technology is specially suitable for the fabrication of uniform arrays of spherical mirrors with small numerical apertures for use in Hartmann-Shack wavefront sensors. Optical tests with the hexagonal array of molded microlenses with pitch of 300μm and focal length of ～30mm demonstrated that the contribution of microlens imperfections into the wavefront reconstruction error does not exceed λ/50 rms.