首页> 外文会议>Conference on Hard X-Ray and Gamma-Ray Detector Physics V; Aug 4-5, 2003; San Diego, California, USA >Advances in the High-pressure Crystal Growth Technology of Semi-insulating CdZnTe for Radiation Detector Applications
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Advances in the High-pressure Crystal Growth Technology of Semi-insulating CdZnTe for Radiation Detector Applications

机译:半绝缘CdZnTe辐射探测器高压晶体生长技术研究进展

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摘要

The properties of large diameter (140 mm) semi-insulating Cd_(1-x)Zn_xTe (x = 0.1) ingots grown by the vertical High-Pressure Electro-Dynamic Gradient (HP EDG) technique are discussed. The HP EDG crystal growth technology recently developed and introduced at eV PRODUCTS significantly improves the downstream CdZnTe detector fabrication yield compared to earlier versions of the HP crystal growth technology. These yield improvements stem from the improved structural and charge transport properties of the HP EDG CdZnTe ingots. Improvements were achieved in three areas: a) reduced thermal stress in the ingots, b) improved single crystal yield, and c) improved electron transport properties. The new state-of-the-art HP EDG crystal growth systems offer exceptional flexibility, thermal and mechanical stability and allow the growth of high purity CdZnTe materials. The flexibility of the multi-zone heater system allows the dynamic control of heat flow to optimize the growth-interface shape during crystallization. This flexibility combined with an advanced control system, improved system diagnostics and realistic thermal modeling provides an excellent platform for further process development. Results on the initial HP EDG CdZnTe ingots grown with low temperature gradient show the complete elimination of ingot cracking. The increased single crystal yield combined with the unproved electron transport properties allows the fabrication of large-volume electron-only devices at higher yield. The CdZnTe ingots regularly contain sections with electron mobility-lifetime product μτ_e≥ 5.0x10~(-3) cm~2/V and occasionally yield material with μτ_e ≥ 8.0x10~(-3) cm~2/V.
机译:讨论了通过垂直高压电动态梯度(HP EDG)技术生长的大直径(140 mm)半绝缘Cd_(1-x)Zn_xTe(x = 0.1)铸锭的性能。与早期版本的HP晶体生长技术相比,eV PRODUCTS公司最近开发和引入的HP EDG晶体生长技术显着提高了下游CdZnTe检测器的制造良率。这些产量的提高源于HP EDG CdZnTe锭的结构和电荷传输性能的改善。在三个方面实现了改进:a)降低了铸锭中的热应力,b)改善了单晶产率,以及c)改善了电子传输性能。新的最先进的HP EDG晶体生长系统具有出色的柔韧性,热稳定性和机械稳定性,并允许生长高纯度CdZnTe材料。多区域加热器系统的灵活性允许动态控制热流,以优化结晶过程中的生长界面形状。这种灵活性与先进的控制系统,改进的系统诊断和逼真的热建模相结合,为进一步的工艺开发提供了极好的平台。在低温梯度下生长的初始HP EDG CdZnTe锭的结果表明,锭裂纹的完全消除。单晶产率的提高与未经证实的电子传输性能相结合,可以以更高的产率制造大体积的纯电子器件。 CdZnTe晶锭通常包含电子迁移率-寿命乘积μτ_e≥5.0x10〜(-3)cm〜2 / V的断面,偶尔会产生μτ_e≥8.0x10〜(-3)cm〜2 / V的材料。

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