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ANNEALING OF SEMI-INSULATING CDZNTE CRYSTALS
ANNEALING OF SEMI-INSULATING CDZNTE CRYSTALS
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机译:半绝缘CDZNTE晶体的退火
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摘要
In a method of annealing a Cd1-x Z n x T e sam-ple/wafer,surface contamination is removed from the sam-ple/waferand the sample/wafer is then introduced into achamber. The chamber is evacuated and Hydrogen or Deu-teriumgas is introduced into the evacuated chamber. Thesample/wafer is heated to a suitable annealing temperaturein the presence of the Hydrogen or Deuterium gas for apredetermined period of time.
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机译:在对Cd1-x Z n x e e样品/晶片进行退火的方法中,从样品/晶圆去除表面污染然后将样品/晶圆放入室。真空室被抽空,氢气或氘气气体被引入真空室。的将样品/晶片加热到合适的退火温度在氢气或氘气存在下预定的时间段。
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