Chemcial vapor detection using microfabricated flexural plate silicon resonator arrays

摘要

Draper Laboratory is developing chemical vapor detection arrays based on microfabricated silicon resonators coated with thin film molecular recognition chemistry. The resonators within the micro-Chemical Analysis Array ( um CANARY) are micro-electromechanical flexural plate wave (FPW) sensors that have been miniaturized to allow many independently addressable sensors to be integrated within a single silicon chip. The target analyte of an individual sensor within the chip is selected by placing a microdroplet of the molecular recognition component (or "coating") into a well surrounding the resonating membrane. Detection is performed by monitoring changes in the frequency and damping factor of the resonance as the coating interacts with the environment. In addition to the system capabilities afforded by the ability to monitor many chemical or biochemical interactions simultaneously, the um CANARY operates in air or liquid environments, utilizes low-cost, low-power address/excitation/readout circuitry, and has demonstrated high detection sensitivity.