首页> 外文会议>Conference on Advanced Laser Technologies; Sep 15-20, 2002; Adelboden, Switzerland >Performance study of hydrogen effect in Pd thin films irradiated by an UV irradiation
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Performance study of hydrogen effect in Pd thin films irradiated by an UV irradiation

机译:紫外线辐照Pd薄膜中氢效应的性能研究

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New studies concerning the performance of Pd films embedded with hydrogen are presented. The films were realized on Si wafers by thermal evaporation and soaked in hydrogen for different days. Every experiment processed two or more samples, one of which was irradiated by an excimer laser the day before its analysis. The laser fluence was lower than 25 mJ/cm~2 in order to avoid the film ablation and the maximum gas pressure was 5 bar. The samples were analysed by Scanning Electron Microscopy (SEM) and an electron microanalysis (EDX). Just after four processing days the films showed a morphological modification while with more than eight processing days new elements were observed, Na, S, Ca and Rn. The found elements were absent in the no-treated samples.
机译:提出了有关嵌入氢的Pd薄膜性能的新研究。通过热蒸发将膜实现在Si晶圆上,并在氢气中浸泡不同的时间。每个实验处理两个或多个样品,分析前一天用准分子激光辐照其中一个。为了避免薄膜烧蚀,激光能量密度低于25 mJ / cm〜2,最大气压为5 bar。通过扫描电子显微镜(SEM)和电子显微分析(EDX)分析样品。在处理四天后,薄膜显示出形态上的改变,而在处理八天以上时,观察到了新的元素Na,S,Ca和Rn。未处理的样品中不存在发现的元素。

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