MICROSTRUCTURE - OPTICAL PROPERTIES CORRELATION IN PZT FILMS

摘要

The substrate nature and the heating rate lead to the crystallization of the amorphous PZT films in different manners (as evidenced by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). For the films deposited on Pt, Ag, Si the perovskite phase formation is a slow process, taking place by a two-stage transition (amorphous state to metastable pyrochlore phase then to a stable perovskite phase). For the film deposited on Ti there is a single state transition (amorphous state to perovskite state).