Design and Fabrication of Flexible Differential Scanning Nanocalorimeter

摘要

This paper discussed about the design and fabrication process of flexible MEMS based Differential Scanning Calorimeter that greatly enhanced the detection limit and accuracy that allowed for evaluation of molecular interaction. The design utilized polyimide to significantly reduce thermal conduction by hundreds of times than traditional used substrate material. Preliminary fabrication result had successfully demonstrated the polyimide membrane can be firmly adhesive on the wafer during fabrication and easily peeled off from the rigid substrate after the process. Temperature sensing material, VO_x was prepared by DC magnetron sputter of sintered vanadium target with O_2 flow during the sputtering. Deposition conditions such as the O_2 flow rate's influence on the electrical resistivity and temperature coefficient resistance was investigated. The results fully showed that the material prepared by the method has satisfactory performance to be used as thermistor in the calorimeter. Also, research about thermal analysis of the system further guided and confirmed the feasibility of the design.