Differential Interference Contrast Scanning in Imaging System Design

摘要

The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives light from a light source. Light from the polarizer is directed to a Wollaston prism as it passes through a half-wave plate. The use of TDI-CCD sensors and darkfield/brightfield sensors provides high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.