State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China,'University of Chinese Academy of Sciences, Beijing 100049, China;
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China,'University of Chinese Academy of Sciences, Beijing 100049, China;
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
Micro structure; dimensional metrology; modulation depth; measurement stability;
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机译:探索扫描电子显微镜在纳米范围内光致抗蚀剂结构的关键尺寸度量衡方面的局限性
机译:基于调制深度在扫描宽带光干涉法中的微结构尺寸计量
机译:使用低温扫描隧道显微镜和光谱学对基于分子和基于过渡金属的低维系统电子结构的局部探针研究。
机译:基于广域结构光学显微镜和高速远程深度扫描的三维图像细胞仪
机译:基于宽场结构光学显微镜和高速远程深度扫描的三维图像细胞仪