SEMI Standardization Efforts in Compound Semiconductors

摘要

The history and purpose of the SEMI Standards organization is presented with emphasis on the applications to the Compound Semiconductor Industry. A description of the processes used to develop a SEMI Standard, the consensus balloting procedure, and formal Standards publication is explained. Current standards development activities in the Compound Semiconductor Committee including work on GaAs, InP, SiC, electrical properties and proposed task forces are reviewed.