Status of SEMI Standardization Efforts in Compound Semiconductors

摘要

The SEMI (Semiconductor Equipment and Materials International) North American Compound Semiconductor Committee is organized into five Task Forces: Indium Phosphide, Indium Antimonide, Gallium Arsenide, Silicon Carbide, and Electrical Properties. Progress and current status of the projects undertaken by the committee and task forces are reviewed and outlined. In addition the cooperative programs between SEMI Standards and ASTM are discussed.