The Infineon Silicon MEMS Microphone

摘要

This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly siliconrnmembrane system. MEMS chips from 1.4mm down to 1.0mm side length are applied for mobilerncommunication. Design aspects related with key performance parameters such as sensitivity, signal tornnoise ration and distortion are discussed. Sensitivity of -38BV/Pa is achieved for different microphonernmembrane diameters. A maximum signal to noise ration of 66dB(A) for the largest system could bernachieved. The perfect fit of simulation versus measurements enables deeper analysis and balancingrnof noise contributors. Environmental noise suppression of 5dB by acoustical high pass design isrndemonstrated.