Improvements to a Range Management System in an Automated Wafer Fabrication Fab

机译：自动化晶圆制造Fab中距离管理系统的改进

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The Range Management system was implemented in IBM''s 300mm fab located in Hopewell Junction, NY. The fab processes a diverse mix of low and high volume production technologies in conjunction with processing development hardware for future technologies. T

机译：Range Management系统是在位于纽约州Hopewell Junction的IBM 300毫米晶圆厂中实施的。该晶圆厂结合了低产量和高产量生产技术的多样化组合以及用于未来技术的加工开发硬件。 Ť

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《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.93-95|共3页
会议地点 StresaItaly
作者
Shikalgar; S.T.;
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1. An impending deadlock-free scheduling method in the case of unified automated material handling systems in 300 mm wafer fabrications [J] . Zhou Qi, Zhou Bing-Hai Journal of Intelligent Manufacturing . 2018,第1期

机译：在300 mm晶片结构中的统一自动化材料处理系统的情况下即将到来的致命锁定调度方法
2. A performance analytical model of automated material handling system for semiconductor wafer fabrication system [J] . Zhang J., Qin W., Wu L. H. International Journal of Production Research . 2016,第5a6期

机译：半导体晶圆制造系统自动材料处理系统的性能分析模型
3. A deadlock recovery strategy for unified automated material handling systems in 300 mm wafer fabrications [J] . Zhou Qi, Zhou Bing-Hai Computers in Industry . 2016,第Null期

机译：300毫米晶圆制造中统一的自动化材料处理系统的死锁恢复策略
4. Improvements to a Range Management System in an Automated Wafer Fabrication Fab [C] . Shikalgar S.T. IEEE/SEMI Advanced Semiconductor Manufacturing Conference . 2007

机译：在自动晶圆制造工厂中的范围管理系统的改进
5. Off-wafer fabrication of asymmetric, polymeric gastrointestinal micropatch systems: Characterization of Caco-2 monolayer binding and compatibility. [D] . Tao, Sarah Lynn. 2006

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7. A constraint-based systems approach to line yield improvement in semiconductor wafer fabrication [O] . Menon Viju S. (Viju Sreedhara) 1994

机译：基于约束的系统方法可以提高半导体晶圆制造中的线路良率

Improvements to a Range Management System in an Automated Wafer Fabrication Fab

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