PPPS-2013: Fabrication and electrical characteristics of arrays microplasma device with coplanar electrodes in Al foil

摘要

driven by AC square signal and sinusoidal waveform show that the range of the ignition voltage is approximately 220∼300V. In particular, the microplasma device 150 μ m in diameters operated at voltages below 210V at a proper gas pressure produce uniform glow dis charge confined in the microcavities and exhibit high radiative efficiency. Furthermore it is evident that the coplanar electrodes microplasma device can be well suited for plasma generating and reactors having potential application in active displays a nd backlighting as well.