PPPS-2013: Fabrication and electrical characteristics of arrays microplasma device with coplanar electrodes in Al foil

摘要

Recent years, a new class of microcavity plasma devices has merged, in which the low temperature, nonequilibrium plasma with unique characteristics, such as weakly-ionized, boundary dominated phenomena and high ion density, was generated in the cavity. Meanwhile there is currently rapid growth of micro plasma application involved environmental ultraviolet radiation sources, plasma reactors, active displays and so on. In this presentation, a Al/Al2O3/Al microplasma device structure with c oplanar electrodes fabricated in Al foil and operation in neon is develped. This device is fabricated on a Al foil having thickness in 100μ m by wet chemical processing. The devices have been operated continuously in neon at pressures up to and exceeding one atmosphere. The experiment results for the line array with microcavities having parabolic cross-section dimension of 100×150 mm2 or 150×200 mm2 driven by AC square signal and sinusoidal waveform show that the range of the ignition voltage is approximately 220∼300V. In particular, the microplasma device 150 μ m in diameters operated at voltages below 210V at a proper gas pressure produce uniform glow dis charge confined in the microcavities and exhibit high radiative efficiency. Furthermore it is evident that the coplanar electrodes microplasma device can be well suited for plasma generating and reactors having potential application in active displays a nd backlighting as well.