Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles

摘要

Silicon nanocrystals (SNCs) have potential applications as fluorescent markers and for solar cells due to their favorable optical properties compared to bulk silicon. Synthesis of SNCs, a few nm in size, using low temperature plasmas has many advantages over liquid based techniques.[1] In this process, a low temperature plasma is produced in a silane (SiH