Magnet-coil force actuator microtensile test device for the measurement of mechanical properties of MEMS structure materials

摘要

With the development of MEMS/NEMS, the requirement for load and displacement resolution becomes much higher. Magnet-coil force actuator for microtensile test device is an accurate method for testing and evaluation of microano structure's mechanical properties. After analysis of the testing principle, the high input impedance operational amplifiers circuit and the drive-cable technique of high precision capacitance type displacement sensor were suggested to be used, which shows good linearity, accuracy and higher stability. The displacement resolution can be improved to 0.84nm and great enhancement of the accuracy can be achieved. With the aid of virtual Instrument LabView software and program compiled in advance ,through A/D sampling card (ZTPCI8310), data are obtained, processed and analyzed. The displacement-load curve and performance parameters, such as Young's modulus, tensile strength, can be showed immediately on the virtual oscillograph. The experimental process can be greatly simplified. In this article the principle of capacitance type displacement sensor and data processing and analysis by the virtual Instrument LabView software were described in detail.