ELECTROSTATIC LEVITATION IN COMB MICROACTUATORS

机译：梳状微执行器中的静电悬浮

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The influence of the electrostatic levitation force on the positioning of the mobile structure of a combrnmicroactuator is studied by using two approximate analytical methods and a finite element numericalrnmethod.

机译：利用两种近似分析方法和有限元数值方法研究了静电悬浮力对梳状微执行器活动结构定位的影响。

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来源
《4th International symposium on advanced topics in electrical engineering (ATEE 2004)》|2004年|1-6|共6页
会议地点 Bucharest(RO);Bucharest(RO)
作者
Anca TOMESCU; Mihaela GHITIU; Sorin ANTONIU;
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作者单位

Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan Nicolae POPArnGB–CONSULT, Bucharest;

Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan Nicolae POPArnGB–CONSULT, Bucharest;

Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan Nicolae POPArnGB–CONSULT, Bucharest;

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1. Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator [J] . Megat Muhammad IkhsanMegat Hasnan, Mohd FaizulMohd Sabri, SuhanaMohd Said, ScientificWorldJournal . 2014,第3期

机译：高力密度鱼骨形静电梳状微致动器的建模
2. Finite-Time Stabilization of a Comb-Drive Electrostatic Microactuator [J] . He G., Geng Z. Mechatronics, IEEE/ASME Transactions on . 2012,第1期

机译：梳状驱动静电微执行器的有限时间稳定度
3. Characteristics modes of electrostatic comb-drive X-Y microactuators [J] . Harness T., Syms RRA. Journal of Micromechanics and Microengineering . 2000,第1期

机译：静电梳状驱动X-Y微执行器的特性模式
4. Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives [C] . La, Gary K. Fedder, Qi Jing, International Conference on Modeling and Simulation of Microsystems . 2000

机译：CMOS Z轴微致动器与静电梳状驱动的仿真与表征
5. Measurement of Mass Evaporation of Ni-Based Single Crystal Super Alloy Using Electrostatic Levitation (ESL) & Electromagnetic Levitation (EML) [D] . Nawer, Jannatun. 2018

机译：静电悬浮（ESL）和电磁悬浮（EML）基于Ni基单晶超合金质量蒸发的测量
6. Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator [O] . Megat Muhammad Ikhsan Megat Hasnan, Mohd Faizul Mohd Sabri, Suhana Mohd Said, -1

机译：高力密度鱼骨形静电梳状驱动微执行器的建模
7. Trial Fabrication of a Movable 3-D Optical Waveguide Integrated with a Comb-type Electrostatic Microactuator [O] . Hidenori Saito, Hiroyuki Fujita 1996

机译：试验制造与梳型静电微致动器集成的可移动3-D光波导

ELECTROSTATIC LEVITATION IN COMB MICROACTUATORS

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