Applying Combinatorial Chemistry Methodology to Optimizing the Growth of Indium Tin Oxide on Polymeric Substrates

摘要

Deposition conditions yielding good indium tin oxide (ITO) films on glass, with transmission > 85% and resistance < 15 Ohms/square, led to ITO films on plastic with cracks, decreased transmission, and increased resistance. By systematically changing key growth conditions during the deposition of ITO on large polymeric substrates, libraries of films were grown. The transmittance and resistance of the thin film libraries were characterized and the results correlated to the instantaneous growth conditions for the particular films. This combinatorial approach to optimizing the growth of ITO on a different substrate substantially decreased the number of experiments, and consequently the total time, necessary to determine the appropriate deposition conditions for the new substrate.