SURFACE ROUGHNESS ANALYSIS AND IMPROVEMENT OF PMMA-BASED MICROFLUIDIC CHIP CHAMBER BY CO2 LASER CUTTING

摘要

We studied the surface roughness of chamber sidewall in the PMMA-base microfluidic chip which was cut with CW CO2 laser at different laser parameters and ambient temperature. Our observations show that the surface roughness is mostly resulted from the residues near the laser cutting edge，which are produced from bubble bursting. In order to improve the quality of the cut surface, we proposed to preheat PMMA plate to a suitable temperature before laser processing, and found that would obtain better surface roughness at 70°C~90°C. The best result in our experiment was Ra=100.86 nm when preheat PMMA plate to 85 °C in the water.