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Electrodeposition of Poly(phenylene oxide) Nanoscale Patterns with Nanosphere Lithography

机译:纳米球平版印刷术电沉积聚苯醚纳米图形

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摘要

Nanosphere lithography is used to generate a poly(phenylene oxide) (PPO) nanowell nanopattern. The thickness of the PPO film increased with increasing the scan cycle number and the monomer concentration and reached the maximum thickness of a bout 20 nm. The size and pitch of the nanowells can be adjusted by the size of the nanospheres used.
机译:纳米球光刻用于生成聚苯醚(PPO)纳米孔纳米图案。 PPO膜的厚度随着扫描循环次数和单体浓度的增加而增加,并达到约20 nm的最大厚度。纳米孔的尺寸和间距可以通过所使用的纳米球的尺寸来调节。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Department of Mechanical Aerospace Engineering, West Virginia University, P.O. Box 6106, Morgantown, WV 26506, USA;

    Department of Mechanical Aerospace Engineering, West Virginia University, P.O. Box 6106, Morgantown, WV 26506, USA;

    Department of Mechanical Aerospace Engineering, West Virginia University, P.O. Box 6106, Morgantown, WV 26506, USA;

    Department of Mechanical Aerospace Engineering, West Virginia University, P.O. Box 6106, Morgantown, WV 26506, USA;

    Department of Mechanical Aerospace Engineering, West Virginia University, P.O. Box 6106, Morgantown, WV 26506, USA;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TP212.2;
  • 关键词

  • 入库时间 2022-08-26 14:19:32

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