Electrophoretic Deposition and Characterization of a FGM Piezoelectric Monomorph Actuator

摘要

In this paper, a FGM monomorph actuator was fabricated and its properties were also investigated. The procedure of fabricating such an actuator using electrophoretic deposition (EPD) was first established. The important processing parameter, such as zeta potential, was determined. The microstructure of the deposits was examined using SEM. Smooth gradient microstructure was observed over the cross section. The displacement of a monomorph, with dimension of 15.0 mm in length, 3.0 mm in width and 0.3 mm in thickness, was measured to be 4.16 μm under 100 V with low loss using fotonic sensor. Both the microstructure and the electromechanical properties of the FGM monomorph actuator have indicated that EPD technique is a promising fabrication method for preparation of high performance components.