The piezoelectric actuator using the aerosol deposition method, a piezoelectric actuator, an inkjet printer and an inkjet head and method for manufacturing an ink jet printer and ink jet head

摘要

PPROBLEM TO BE SOLVED: To provide a manufacturing technique of a piezoelectric actuator for an inkjet head capable of suppressing any degradation in printing quality due to thickness distribution as much as possible even when the thickness distribution occurs in the thin film layer formed on a substrate with the AD method. PSOLUTION: A piezoelectric material layer 31 is formed on a vibration plate 30 by jetting aerosol which contains particles of a piezoelectric material and a carrier gas, from a film forming nozzle to the vibration plate 30 while moving the film forming nozzle relative to the vibration plate 30 in a direction perpendicular to the scanning direction of the inkjet head 1. PCOPYRIGHT: (C)2008,JPO&INPIT