Dept. of Mech. Aerosp. Eng., Sapienza Univ. of Rome, Rome, Italy;
beams (structures); cantilevers; control system synthesis; finite element analysis; grippers; micromanipulators; micromechanical devices; sputter etching; D-RIE construction process; FEA simulations; MEMS technology CSFH based microgripper design; comb-drive actuation; conjugate surface flexure hinge; curved cantilever beam; deep reactive-ion etching construction process; finite element analysis simulations; Actuators; Fasteners; Force; Grippers; Kinematics; Load modeling; Micromechanical devices;
机译:基于CSFH MEMS技术的铰链的运行表征
机译:具有集成双轴驱动和力感测功能的去耦XY MEMS微抓钳的设计和分析
机译:具有集成式微夹具的电热MEMS微执行器的开发和建模
机译:开发MEMS技术CSFH基微粒子
机译:使用基于微机电系统(MEMS)的制造技术开发可变形电子产品。
机译:3D打印MEMS技术-最新发展和应用
机译:勘误表:绝缘体上的性能是基于硅的电热致动的硅片流程
机译:基于mEms的功率mEms应用硅基灰度技术的开发与优化