Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing * * This work was supported in part by the Macao Science and Technology Development Fund under Grant 090/2015/A3 and 024/2014/A1

摘要

This paper presents the design, analysis, and simulation study of a novel micro-electromechanical system (MEMS) microgipper with two decoupled electrostatic actuators and two capacitive force sensors dedicated to the testing in compressive and shear directions of soft samples. The gripper mechanism is designed based on the two-prismatic-prismatic (2-PP) parallel structure and folded leaf flexure guiding mechanism. Owing to the design of decoupled actuation structure, the translations of the two gripping arms are parallel, which ensures the reaction force between two tips and grasped object in sole gripping direction. At the same time, this structure also offers a good decoupling property. The analytical model is verified by carrying out finite element analysis (FEA) simulation study, which confirms the feasibility and effectiveness of the proposed design. The fabrication procedure by SOIMUMPs process is also given, and the microgripper will be fabricated for future experimental study.