The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
The State Key Laboratory of Transducer Technology, Institute of Electronics Chinese Academy of Sciences, Beijing, CHINA;
Resonators; Sensitivity; Couplings; Acceleration; Couplers; Sensors; Micromechanical devices;
机译:利用非线性来提高基于静电耦合MEMS谐振器的模式局部质量传感器的灵敏度
机译:基于微机电系统(MEMS)基于电容式加速度计的麦克风,具有增强的灵敏度,可实现完全植入的助听器:一种新的分析方法
机译:使用机械放大机制提高MEMS加速度计的灵敏度
机译:使用机械耦合模式局部化MEMS加速度计的微杆耦合器提高参数灵敏度
机译:用于电容MEMS加速度计灵敏度表征的仅电刺激BIST IC
机译:低G MEMS加速度计具有高灵敏度低非线性和基于3-DOF弱耦合谐振器的模式定位的大动态范围
机译:增强电耦合mEms谐振器的参数灵敏度