Density Measurement Performance in Flowing Liquid Using Microcantilever-Based Resonators under Bending and Torsion Vibrations

摘要

The performance of microcantilever-based resonator working under different operation modes is analyzed in fluid density determination at different flow velocities. A setup is designed to control the liquid flow velocity along normal and tangential directions in the range of 0-4.37 m/s. Microcantilever-based resonators are fabricated with different lengths, which are excited to vibrate under 1^st bending and 2^nd torsion modes. The experimental results show that the normal flow velocity plays a leading role to impair the density measuring accuracy. The microcantilever-based resonator with shorter length and in higher order vibration mode is demonstrated to have a better measurement performance in flowing liquids.