Decoupling design of stiffness and mass for micro shell resonator with high sensitivity

摘要

This paper proposes the decoupling design of stiffness and mass for micro shell resonator with high sensitivity using out-of-plane electrode. The resonator structure, including shell and shell edge, is primarily designed based on decoupling of effective stiffness and mass. The shell structure is built on the basis of the shell cross-sectional shape that can be designed analytically to change the effective stiffness (k_eff) while shell edge is just used to adjust the effective mass (M_eff). The decoupling design significantly simplifies the structure design and optimization. Besides it is also flexible to adjust the dynamic parameter of the resonator by changing the geometry for high sensitivity. Out-of-plane electrode has been employed to drive and sense the spatial deformation of wineglass modes. Comparing with the conventional resonator using out-of-plane electrode, the present resonator reveals a smaller mode frequency and a 4.48 times improvement in drive amplitude, which results in superiority in sensitivity.