Eight-trigram-inspired MEMS thermal wind sensor with improved accuracy

摘要

In this paper, a high accurate MEMS thermal wind sensor inspired by the Eight Trigrams is demonstrated. The sensor, shaped like the Eight Trigrams, consists of eight central heaters and eight thermistors placed on ceramic substrate. This configuration can be divided into two wind sensing groups, cross-type group and saltire-type group. The two groups monitor the wind independently, and the final measured wind speed and direction information is extracted by the measurement results of the two groups. Based on the Eight-Trigram design, the sensor achieves significantly improved accuracy. For the wind speed up to 33m/s, the sensor has a measurement error less than ±1%, and the airflow direction over the full range of 360° is determined with a maximum error of ±1.5°.